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Diagnostics of Debris from Laser-Produced Tin Plasma with Droplet Target for EUV Light Source
EUV Debris Laser-produced plasma
2009/6/1
In the development of extreme ultraviolet (EUV) light source for EUV lithography systems by laser-produced plasma (LPP), mass-limited targets such as a micro-droplet were considered as promising targe...
The Influence of Instrument Application Frequency on Apical Extrusion of Debris in Three Instrumentation Techniques
Canal Preparation Application Number Debris Extrusion
2009/4/2
Introduction: Various kinds of hand-held or rotary techniques are used for mechanical preparation of the canal. The purpose of this study was to assess the influence of the number of applications on...