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Ta-doped In2O3 transparent conductive films with high transmittance and low resistance
sputtering In2O3 transparent conductive oxide thin films
2011/5/6
Ta-doped In2O3 transparent conductive oxide (TCO) thin films are deposited on glass substrates
by radio-frequency (RF) sputtering at room-temperature. The influence of sputtering power on
the struct...
Deposited indium-tin-oxide (ITO) transparent conductive films by reactive low-voltage ion plating (RLVIP) technique
ITO film RLVIP Optical transmittance Infrared reflectance Sheet resistance
2011/12/7
Indian-tin-oxide ITO transparent conductive films were deposited by the Reactive low-voltage ion plating (RLVIP) technique. CO2 and O2 gases were used as reactive gases coming into the vacuum. The eff...