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Electrical resistivity of copper oxide thin films prepared by reactive magnetron sputtering
Electrical properties Magnetron sputtering Thin films
2010/2/10
Purpose: Investigation the effect of varying r.f. power and oxygen flow rates during deposition on the electrical properties of copper oxide thin films prepared by reactive magnetron sputtering Design...
Characterisation of TiCxOy thin films produced by PVD techniques
Mechanical properties Multifunctional materials Ti-C-O Structure
2010/2/22
Purpose: The purpose of this work consists in the characterisation of TiCxOy thin films produced by dc reactive magnetron sputtering. The main goal consists in studying the influence of the reactive g...