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Characterisation of polystyrene coatings after plasma immersion ion implantation and adsorption of protein
Plasma immersion ion implantation X-ray reflectometry neutron reflectometry ellipsometry protein polystyrene
2012/4/20
A polystyrene film spun onto polished silicon substrates was implanted with either nitrogen or argon ions using plasma immersion ion implantation (PIII) and subsequently investigated by X-ray and neut...
Study of surface exfoliation on crystalline silicon induced by Co-implantation of He and H ions
crystalline Si He and H ion implantation surface blistering and exfoliation bubbles growth
2009/8/14
Crystalline n-type Si (100) wafers were implanted at room temperature with
160 keV He ions to a fluence of 5×1016cm－2 or 40 keV H ions to a fluence of 1×1016cm－2, singly or in combination, followed ...