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Analysis on SOI(Silicon-on-Insulator)-based MMICs(Multimode Interference Couplers) with different thickness of upper Silicon layer
SOI MMICs thickness Silicon layer MMI
2010/7/16
It is compared with each other that MMIs made of SOI wafers with different thickness of upper Si layer have different properties. MMI coupler made of SOI wafers with thinner Si layer has better self-i...