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Ta-doped In2O3 transparent conductive films with high transmittance and low resistance
sputtering In2O3 transparent conductive oxide thin films
2011/5/6
Ta-doped In2O3 transparent conductive oxide (TCO) thin films are deposited on glass substrates
by radio-frequency (RF) sputtering at room-temperature. The influence of sputtering power on
the struct...
Low resistance ohmic contacts to n-GaAs for application in GaAs/AlGaAs quantum cascade lasers
ohmic contacts sputtering
2011/5/10
This paper reports on the results of optimization of ohmic contacts for GaAs/AlGaAs quantum cascade lasers (QCLs). Technological parameters during optimization concerned surface preparation, evaporat...