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Methods of silicon surface structurization for the purpose of the deposition of III-V epitaxial layers
textured silicon substrates anisotropic etching
2011/5/10
This paper presents the results of the texturing of silicon substrates with various crystallographic orientations by anisotropic etching, both in a maskless process and in a process employing speciall...
High-sensitivity NO2 sensor based on n-type InP epitaxial layers
indium phosphide epitaxial layers gas sensors resistance surface states computer simulations
2011/4/27
The structure and sensing properties of a novel resistive NO2 sensor based on n-type InP epitaxial layers have been presented. The studies of sensor resistance changes due to adsorbed gas NO2 under ex...