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Nanoelectromechanical device fabrications by 3-D nanotechnology using focused-ion beams
nanoelectromechanical device nanotool focused ion beam (FIB)
2010/1/19
Nanoelectromechanical devices, which can be used as nanotools in nanofactories, were fabricated by focused ion beam chemical vapor deposition (FIB-CVD). The devices are made of diamond-like carbon (DL...