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Improvement of temperature uniformity in rapid thermal processing systems using multivariable control
Temperature uniformity rapid heat treatment system a semiconductor chip the chip temperature distribution the chip
2015/8/12
During rapid thermal processing (RTP) of a semiconductor wafer, maintenance of near-uniform wafer temperature distribution is necessary. This paper addresses the problem of insuring temperature unifor...
Multivariable feedback control of semiconductor wafer temperature
Multivariate semiconductor chip temperature temperature control chip rapid heat treatment semiconductor chips sensors
2015/8/12
The authors consider the problem of wafer temperature control in rapid thermal processing (RTP) of semiconductor wafers. They present a novel approach to the analysis of candidate sensor configuration...
Discrete-Time Multivariable Adaptive Control.
Discrete-Time Multivariable Adaptive Control。
C*-algebras with the weak expectation property and a multivariable analogue of Ando's theorem on the numerical radius
C*-algebras the weak expectation property Ando's theorem the numerical radius
2011/8/23
Abstract: A classic theorem of T. Ando characterises operators that have numerical radius at most one as operators that admit a certain positive 2x2 operator matrix completion. In this paper we consid...
Uniform approximation of a class of multivariable trigonometric interpolation polynomials in Euclidean space
triangle summation operator uniform convergence
2010/9/25
To improve the uniform convergence of the classical Lagrange operators of several variables, we construct a new operator with a class of summation factors. It is proved that the new operator converges...
A family of fractional integrals pertaining to multivariable I-function
Fractional integral Eulerian integral
2010/9/25
The object of this paper is to derive an Eulerian integral and a main theorem based upon the fractional operator associated with ¯H -function [3] and multivariable I-function [4] which provide un...
Nonlinear multivariable analysis of SOI and local precipitation and temperature
Nonlinear multivariable analysis SOI local precipitation and temperature
2009/11/9
Global climate variability affects important local hydro-meteorological variables like precipitation and temperature. The Southern Oscillation (SO) is an easily quantifiable major driving force that g...
期刊信息
篇名
Creating Multivariable Response Surfaces by Using the Two-Stage Adaptive Sampling Techniques and Its Application in Optimization of Grounding Grids.
语种
英文
撰写或编译
撰写
作者
J. Zou,J. Guo,B. Zhang,J....